Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
An Introduction to Microelectromechanical Systems Engineering
Brand: Artech House Print on Demand
$50.13 - $62.66
- UPC:
- 9780890065815
- Maximum Purchase:
- 2 units
- Binding:
- Hardcover
- Publication Date:
- 2000-11-30
- Author:
- Nadim Maluf
- Language:
- english
- Edition:
- First Printing