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An Introduction to Microelectromechanical Systems Engineering

Brand: Artech House Print on Demand

$50.13 - $62.66
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UPC:
9780890065815
Maximum Purchase:
2 units
Binding:
Hardcover
Publication Date:
2000-11-30
Author:
Nadim Maluf
Language:
english
Edition:
First Printing
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Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.